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  • Thesis

  • Authors: Jain, Ankur (2006)

  • Imaging technologies such as optical coherence tomography (OCT), two-photon excitation fluorescence microscopy (TPEF), and second harmonic generation (SHG) microscopy require optical scanners to transversely scan a focused laser beam onto the tissue specimen being imaged. However, for in vivo early-cancer detection of internal organs the optical scanners must be integrated into slender endoscopes. The goal of this work is to develop millimeter-sized MEMS optical scanners packaged inside endoscopes to enable endoscopic biomedical imaging. This work reports MEMS micromirrors and microlens scanners fabricated using post-CMOS micromachining processes, which can provide large scan ranges at low driving voltages. Several 1-D and 2-D micromirror scanners have been designed, fabricated a...