Ấn phẩm:
Etude des catalyseurs de croissance de nanotubes de carbone monoparois synthetises par CVD
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Tóm tắt
This thesis is focussed on the chemical vapour deposition method to produce single wall carbon nanotubes.The purposes of this research are to understand exactly the role of the various chemical components presented in catalyst for the producing of SWNTs, to control process conditions, to develop synthesis techniques for SWNTs on patterned catalyst that allow the integration for electronic devices and to transfer process to industrial CVD instrument. Experimental investigations are resented which allow getting a comprehensive picture of the powder catalyst growth of carbon nanotubes film. The role of each element in catalyst and the optimal amount of them are illustrated. Based on the electron microscopy, Raman spectroscopy, X-Ray diffraction, X-Ray photoelectron spectroscopy and microbalance results, a new component, (FexAly)(Al2-yFe1-x)O4, is detected. Subsequent studies of the properties of the produced carbon nanotubes grown by CVD reveal significant features of the product. Based on those experimental results, a mechanism for the growth of carbon nanotubes on the powder catalyst is suggested. Furthermore, a purification method of as-grown SWCNT has been developed that provides for the removal of catalyst nanoparticles and impurity carbon. Complementary, by varying global growth parameters such as synthesis temperature, flow ratio of carbonaceous/hydrogen gas and growth time, this study attempts to control the process condition for the synthesis high yield of SWNTs. Furthermore, we present the results of the transfer of the synthesis process of SWNTs from the EASYTUBE system (small tubular CVD reactor) to industrial CENTURA tool (compatible wafer 200 mm) and the patterned growth of SWNTs for electrical devices.
Mô tả
xxxviii, 164 p.
Tác giả
Lê, Văn Thăng.
Người hướng dẫn
Baptist, Robert.
Nơi xuất bản
Nhà xuất bản
Institut National Polytechnique de Grenoble
Năm xuất bản
2008
ISSN tạp chí
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Từ khóa chủ đề
Chemistry, Technical. , Hóa học, Công nghệ.